Suspended Si/air high contrast subwavelength gratings for long-wavelength infrared reflectors

Justin M. Foley; Jamie D. Phillips

doi:10.1117/12.2014532

15 March 2013 Suspended Si/air high contrast subwavelength gratings for long-wavelength infrared reflectors

Justin M. Foley, Jamie D. Phillips

Proceedings Volume 8633, High Contrast Metastructures II; 863310 (2013) https://doi.org/10.1117/12.2014532
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

We report broadband reflectance in the long-wavelength infrared (LWIR, 8-12 μm) utilizing suspended-Si, high-index-contrast subwavelength gratings (HCGs). Iterative design optimization using finite element analysis software has been performed accounting for silicon’s wavelength-dependent index of refraction and extinction coefficient. Grating arrays were fabricated using commercial silicon-on-insulator (SOI) substrates, photolithography and reactive ion etching; subsequent selective wet etching of SiO₂ was used to provide suspended Si/air gratings. Fourier transform infrared (FTIR) spectroscopy demonstrates broadband, polarization–dependent reflectance between 8.5 and 12 μm, which agrees with the simulated response.

Citation Download Citation

Justin M. Foley and Jamie D. Phillips "Suspended Si/air high contrast subwavelength gratings for long-wavelength infrared reflectors", Proc. SPIE 8633, High Contrast Metastructures II, 863310 (15 March 2013); https://doi.org/10.1117/12.2014532

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