Cavity-resonator-integrated guided-mode resonance filters

Shogo Ura; Kenji Kintaka; Junichi Inoue; Kenzo Nishio; Yasuhiro Awatsuji

doi:10.1117/12.2008625

15 March 2013 Cavity-resonator-integrated guided-mode resonance filters

Shogo Ura, Kenji Kintaka, Junichi Inoue, Kenzo Nishio, Yasuhiro Awatsuji

Proceedings Volume 8633, High Contrast Metastructures II; 86330V (2013) https://doi.org/10.1117/12.2008625
Event: SPIE OPTO, 2013, San Francisco, California, United States

Abstract

A cavity-resonator-integrated guided-mode-resonance filter (CRIGF) consisting of a grating coupler (GC) and a pair of distributed-Bragg-reflectors (DBRs) on a thin-film dielectric waveguide is reviewed. The CRIGF has been recently proposed by the authors to provide a narrow-band reflection spectrum for an incident wave of a small beam width from the free space. A newly developed analysis model for device design with performance simulation is introduced. Curved gratings are utilized to construct a resonator for a small-aperture CRIGF. Design, fabrication and characterization of CRIGFs of 10 μm aperture are described with a resonance wavelength of 850 nm. A Ge:SiO₂ guiding core layer was deposited on a SiO₂ glass substrate, and GC and DBRs were formed by the electron-beam direct writing lithography. A normal polarization-dependent CRIGF is shown with a obtained narrowband reflection spectrum of 0.2 nm full width at half maximum. A crossed-CRIGF is also discussed to eliminate the polarization dependence. It is successfully demonstrated that measured reflection spectra for TE and TM incident beams were well coincident with each other.

Citation Download Citation

Shogo Ura, Kenji Kintaka, Junichi Inoue, Kenzo Nishio, and Yasuhiro Awatsuji "Cavity-resonator-integrated guided-mode resonance filters", Proc. SPIE 8633, High Contrast Metastructures II, 86330V (15 March 2013); https://doi.org/10.1117/12.2008625

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