Measurement of the mirror reflective spectrum of typical roughness surface in the ultraviolet band

Lu Bai; Zhen-sen Wu; Yan-hui Li

doi:10.1117/12.999902

26 November 2012 Measurement of the mirror reflective spectrum of typical roughness surface in the ultraviolet band

Lu Bai, Zhen-sen Wu, Yan-hui Li

Proceedings Volume 8557, Optical Design and Testing V; 85570V (2012) https://doi.org/10.1117/12.999902
Event: Photonics Asia, 2012, Beijing, China

Abstract

Reflective light of a surface contains many features of a surface. It is usually used as a powerful tool for process in situ or ex suit monitoring because of its non contact and non destructive nature. Scatter measurements of some typical samples in the UV band are performed by using an ellipsometry WVASE 32 made by J. A. Woolam Co. Inc. The mirror-direction reflective measurement results of different sample obtained by ellipsometer are compared. And these kinds of researches about measuring and analyzing of typical roughness samples in the ultraviolet band have significant meanings in a lot of related fields.

Citation Download Citation

Lu Bai, Zhen-sen Wu, and Yan-hui Li "Measurement of the mirror reflective spectrum of typical roughness surface in the ultraviolet band", Proc. SPIE 8557, Optical Design and Testing V, 85570V (26 November 2012); https://doi.org/10.1117/12.999902

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