A new approach in dry technology for non-degrading optical and EUV mask cleaning

Ivin Varghese; Ben Smith; Mehdi Balooch; Chuck Bowers

doi:10.1117/12.976889

8 November 2012 A new approach in dry technology for non-degrading optical and EUV mask cleaning

Ivin Varghese, Ben Smith, Mehdi Balooch, Chuck Bowers

Proceedings Volume 8522, Photomask Technology 2012; 852218 (2012) https://doi.org/10.1117/12.976889
Event: SPIE Photomask Technology, 2012, Monterey, California, United States

Abstract

The Eco‐Snow Systems group of RAVE N.P., Inc. has developed a new cleaning technique to target several of the advanced and next generation mask clean challenges. This new technique, especially when combined with Eco‐Snow Systems cryogenic CO2 cleaning technology, provides several advantages over existing methods because it: 1) is solely based on dry technique without requiring additional complementary aggressive wet chemistries that degrade the mask, 2) operates at atmospheric pressure and therefore avoids expensive and complicated equipment associated with vacuum systems, 3) generates ultra‐clean reactants eliminating possible byproduct adders, 4) can be applied locally for site specific cleaning without exposing the rest of the mask or can be used to clean the entire mask, 5) removes organic as well as inorganic particulates and film contaminations, and 6) complements current techniques utilized for cleaning of advanced masks such as reduced chemistry wet cleans. In this paper, we shall present examples demonstrating the capability of this new technique for removal of pellicle glue residues and for critical removal of carbon contamination on EUV masks.

Citation Download Citation

Ivin Varghese, Ben Smith, Mehdi Balooch, and Chuck Bowers "A new approach in dry technology for non-degrading optical and EUV mask cleaning", Proc. SPIE 8522, Photomask Technology 2012, 852218 (8 November 2012); https://doi.org/10.1117/12.976889

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