Gamma-ray irradiation of ohmic MEMS switches

John J. Maciel; James L. Lampen; Edward W. Taylor

doi:10.1117/12.928982

15 October 2012 Gamma-ray irradiation of ohmic MEMS switches

John J. Maciel, James L. Lampen, Edward W. Taylor

Proceedings Volume 8519, Nanophotonics and Macrophotonics for Space Environments VI; 851903 (2012) https://doi.org/10.1117/12.928982
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

Radio Frequency (RF) Microelectromechanical System (MEMS) switches are becoming important building blocks for a variety of military and commercial applications including switch matrices, phase shifters, electronically scanned antennas, switched filters, Automatic Test Equipment, instrumentation, cell phones and smart antennas. Low power consumption, large ratio of off-impedance to on-impedance, extreme linearity, low mass, small volume and the ability to be integrated with other electronics makes MEMS switches an attractive alternative to other mechanical and solid-state switches for a variety of space applications. Radant MEMS, Inc. has developed an electrostatically actuated broadband ohmic microswitch that has applications from DC through the microwave region. Despite the extensive earth based testing, little is known about the performance and reliability of these devices in space environments. To help fill this void, we have irradiated our commercial-off-the-shelf SPST, DC to 40 GHz MEMS switches with gamma-rays as an initial step to assessing static impact on RF performance. Results of Co-60 gamma-ray irradiation of the MEMS switches at photon energies ≥ 1.0 MeV to a total dose of ~ 118 krad(Si) did not show a statistically significant post-irradiation change in measured broadband, RF insertion loss, insertion phase, return loss and isolation.

Citation Download Citation

John J. Maciel, James L. Lampen, and Edward W. Taylor "Gamma-ray irradiation of ohmic MEMS switches", Proc. SPIE 8519, Nanophotonics and Macrophotonics for Space Environments VI, 851903 (15 October 2012); https://doi.org/10.1117/12.928982

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available