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Un-repairable defects cause not only delivery delay but also un-negligible loss cost in Large Size Photo Mask (LSPM)
Productions. In order to avoid such loss, Lasertec provides various types of inspection and repair systems.
The Large Size Substrate inspection system LB79 works for qualifying substrates for LSPMs.
In a LSPM maker, the resist coated blanks can be inspected with LIR79i, the In-process Inspection and Repair system.
ADI (After Develop Inspection) also can be performed with the same LIR79i as well as Resist Pattern Repairs with the
Laser shots and the ink dispensing.
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