Peter Verheyen,1 Guy Lepage,1 Joris Van Campenhout,1 Marianna Pantouvaki,1 Philippe Absil,1 Peter De Heyn,2 Wim Bogaerts,2 Pieter Dumon,2 Shankar Selvaraja2
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A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors.
This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes
the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the
flow.
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Peter Verheyen, Guy Lepage, Joris Van Campenhout, Marianna Pantouvaki, Philippe Absil, Peter De Heyn, Wim Bogaerts, Pieter Dumon, Shankar Selvaraja, "Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform," Proc. SPIE 8431, Silicon Photonics and Photonic Integrated Circuits III, 843114 (10 May 2012); https://doi.org/10.1117/12.921747