Piezoelectric cantilevers energy harvesting in MEMS technique

Yingqi Shang; Chengjun Qiu; Hongmei Liu; Xiaojie Chen; Wei Qu; Yanwei Dou

doi:10.1117/12.923423

12 April 2012 Piezoelectric cantilevers energy harvesting in MEMS technique

Yingqi Shang, Chengjun Qiu, Hongmei Liu, Xiaojie Chen, Wei Qu, Yanwei Dou

Proceedings Volume 8409, Third International Conference on Smart Materials and Nanotechnology in Engineering; 840927 (2012) https://doi.org/10.1117/12.923423
Event: Third International Conference on Smart Materials and Nanotechnology in Engineering, 2011, Shenzhen, China

Abstract

Piezoelectric cantilevers energy harvesting made by micro-electromechanical system (MEMS) technology can scavenge power from low-level ambient vibration sources. The developed cantilevers energy harvesting are featured with resonate frequency and power output in microwatt level, which is sufficient to the self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. In this paper, piezoelectric energy harvesting based on thick-film piezoelectric cantilevers is investigated to resonate at specific frequencies of an external vibration energy source, which creating electrical energy via the piezoelectric effect. Our cantilever device has a multiple structure with a proof mass added to the end. The thick film lead zirconate titanate Pb(Zr,Ti)O₃ (PZT) coated on the top of Au/Cr/SiO₂/Si substrates by sol-gel-spin method. The thickness of the PZT membrane was up to 2μm and the cantilevers substrates thickness 50μm, wideness 1.5mm, length 4mm. The Au/Ti top electrode is patterned on top of the sol-gel-spin coated PZT thick film in order to employ the d31 mode. The prototype energy generator has a measured performance of 0.74μW effective electrical power, and 4.93 DC output voltages to resistance load. The effect of proof mass, beam shape and damping on the power generating performance are modeled to provide a design guideline for maximum power harvesting from environmentally available low frequency vibrations. A multiple structure cantilever is designed to achieve compactness, low resonant frequency and minimum damping coefficient, simultaneously. This device is promising to support networks of ultra-low-power sensor.

Citation Download Citation

Yingqi Shang, Chengjun Qiu, Hongmei Liu, Xiaojie Chen, Wei Qu, and Yanwei Dou "Piezoelectric cantilevers energy harvesting in MEMS technique", Proc. SPIE 8409, Third International Conference on Smart Materials and Nanotechnology in Engineering, 840927 (12 April 2012); https://doi.org/10.1117/12.923423

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Ferroelectric materials

Energy harvesting

Microelectromechanical systems

Sensors

Silicon

Electrodes

Lead

Show All Keywords

Keywords/Phrases

Search In:

Publication Years