EUV resist processing with flash-lamp

Julius Joseph Santillan; Koji Kaneyama; Akihiko Morita; Kazuhiko Fuse; Hiroki Kiyama; Masaya Asai; Toshiro Itani

doi:10.1117/12.916342

20 March 2012 EUV resist processing with flash-lamp

Julius Joseph Santillan, Koji Kaneyama, Akihiko Morita, Kazuhiko Fuse, Hiroki Kiyama, Masaya Asai, Toshiro Itani

Proceedings Volume 8325, Advances in Resist Materials and Processing Technology XXIX; 832513 (2012) https://doi.org/10.1117/12.916342
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The reduction of line width roughness (LWR) remains a difficult issue for very fine patterns obtained with extreme ultraviolet (EUV) lithography. Thus, the investigation of LWR-reduction from the viewpoint of resist processing has become necessary. Alternative bake processes, such as the flash-lamp (FL) has been proven feasible as for application in EUV resists. This work focuses on initial investigations for its use in post-development bake (post bake or PB). A polyhydroxystyrene-acryl hybrid EUV model resist was utilized and comparisons with 'no bake' and conventional hot-plate PB conditions were made. As a result, relatively improved LWR was obtained with FL PB with minimal effect on lithographic performance. Moreover, in the course of these experiments, two types of resist reflow mechanisms assumed to be the primary basis for the LWR improvement achieved, are discussed.

Citation Download Citation

Julius Joseph Santillan, Koji Kaneyama, Akihiko Morita, Kazuhiko Fuse, Hiroki Kiyama, Masaya Asai, and Toshiro Itani "EUV resist processing with flash-lamp", Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 832513 (20 March 2012); https://doi.org/10.1117/12.916342

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