Analytical treatment of the deformation behavior of EUVL masks during electrostatic chucking

Gerd Brandstetter; Sanjay Govindjee

doi:10.1117/12.916530

22 March 2012 Analytical treatment of the deformation behavior of EUVL masks during electrostatic chucking

Gerd Brandstetter, Sanjay Govindjee

Proceedings Volume 8322, Extreme Ultraviolet (EUV) Lithography III; 832210 (2012) https://doi.org/10.1117/12.916530
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

A new analytical approach is presented to predict mask deformation during electro-static chucking in next generation extreme-ultraviolet-lithography (EUVL). Given an arbitrary profile measurement of the mask and chuck non-flatness, this method has been developed as an alternative to time-consuming finite element simulations for overlay error correction algorithms. We consider the feature transfer of each harmonic component in the profile shapes via linear elasticity theory and demonstrate analytically how high spatial frequencies are filtered. The method is compared to presumably more accurate finite element simulations and has been tested successfully in an overlay error compensation experiment, where the residual error y-component could be reduced by a factor 2. As a side outcome, the formulation provides a tool to estimate the critical pin-size and -pitch such that the distortion on the mask front-side remains within given tolerances. We find for a numerical example that pin-pitches of less than 5 mm will result in a mask pattern-distortion of less than 1 nm if the chucking pressure is below 30 kPa.

Citation Download Citation

Gerd Brandstetter and Sanjay Govindjee "Analytical treatment of the deformation behavior of EUVL masks during electrostatic chucking", Proc. SPIE 8322, Extreme Ultraviolet (EUV) Lithography III, 832210 (22 March 2012); https://doi.org/10.1117/12.916530

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available