Characterisation And Optimisation Of A Laser Generated Plasma Source Of Soft X Rays For Biological Imaging And Soft X-Ray Lithography

A. M. Rogoyski; P. Charalambous.; C. Hills; A. G. Michette

doi:10.1117/12.965022

4 February 1988 Characterisation And Optimisation Of A Laser Generated Plasma Source Of Soft X Rays For Biological Imaging And Soft X-Ray Lithography

A. M. Rogoyski, P. Charalambous., C. Hills, A. G. Michette

Author Affiliations +

Proceedings Volume 0831, X-Rays from Laser Plasmas; (1988) https://doi.org/10.1117/12.965022
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

Preliminary characterisation of a laser generated plasma source of soft x rays in the wavelength range of approximately 40 to 60 A has been undertaken using a Nd:YAG laser emitting 0.5 J at a wavelength of 1.064 itm radiation in 8 ns pulses at 20 Hz repetition rate. The effects upon x-ray production of moving the target through focus and the consequences of target cratering have been investigated. Results from these experiments have been used for preliminary optimisation of the process of contact replication of test specimens, resulting in the replication of feature sizes of 700 Å.

Citation Download Citation

A. M. Rogoyski, P. Charalambous., C. Hills, and A. G. Michette "Characterisation And Optimisation Of A Laser Generated Plasma Source Of Soft X Rays For Biological Imaging And Soft X-Ray Lithography", Proc. SPIE 0831, X-Rays from Laser Plasmas, (4 February 1988); https://doi.org/10.1117/12.965022

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