Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displays

Wyatt O. Davis; Michael Beard; Robert Jackson

doi:10.1117/12.912187

2 February 2012 Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displays

Wyatt O. Davis, Michael Beard, Robert Jackson

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 825203 (2012) https://doi.org/10.1117/12.912187
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Magnetically-actuated micromachined scanning mirrors have been developed for pico-projectors using laser beam scanning (LBS). The human vision system readily detects imperfections in a LBS display, which become objectionable when scanned beam trajectory errors have amplitudes on the order of only parts per thousand, depending on the human vision system's sensitivity to the type of error and whether it is static or dynamic. The paper describes the overcoming of such challenges to achieve a high quality LBS projection.

Citation Download Citation

Wyatt O. Davis, Michael Beard, and Robert Jackson "Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displays", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 825203 (2 February 2012); https://doi.org/10.1117/12.912187

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