Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique

Minwoo Nam; Sang Sik Yang; Kee-Keun Lee

doi:10.1117/12.908229

15 February 2012 Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique

Minwoo Nam, Sang Sik Yang, Kee-Keun Lee

Proceedings Volume 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI; 825006 (2012) https://doi.org/10.1117/12.908229
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Planar refractive microlens arrays (MLAs) with high fill-factor were developed utilizing polymer replication technique. By using isotropically wet-etched quartz as a master mold, we obtained uniformly arrayed plano-concave patterns on poly(dimethylsiloxane) (PDMS) with a pitch, height, and radius of curvature of 132, 60, and 104.5 μm, respectively. A high refractive index polymer was coated on the patterned PDMS as a light refraction layer. The measured focal length of the fabricated MLA was about 900 μm, showing well correspondence with the simulated one. The diameter of the focused beam spots was 5.4 μm, denoting the excellent light focusing ability.

Citation Download Citation

Minwoo Nam, Sang Sik Yang, and Kee-Keun Lee "Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique", Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 825006 (15 February 2012); https://doi.org/10.1117/12.908229

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