Control of material properties by parallel laser irradiations at multiple laser spots using a spatial light modulator

Masaaki Sakakura; Takaya Tochio; Masahiro Shimizu; Naomi Yasuda; Masatoshi Ohnishi; Kiyotaka Miura; Yasuhiko Shimotsuma; Kazuyuki Hirao

doi:10.1117/12.912752

15 February 2012 Control of material properties by parallel laser irradiations at multiple laser spots using a spatial light modulator

Masaaki Sakakura, Takaya Tochio, Masahiro Shimizu, Naomi Yasuda, Masatoshi Ohnishi, Kiyotaka Miura, Yasuhiko Shimotsuma, Kazuyuki Hirao

Author Affiliations +

Proceedings Volume 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII; 824310 (2012) https://doi.org/10.1117/12.912752
Event: SPIE LASE, 2012, San Francisco, California, United States

Abstract

Applications of the parallel fs laser processing system to spatial control of material properties are presented. In the parallel laser processing system, multiple light spots are generated by modulating the spatial phase distribution of a laser beam with a spatial light modulator. When the light spots are sufficiently separated from each other or the energies of the excitation laser pulses are weak, there is little interaction between photoexcited regions. In many cases, no interaction between each photoexcited regions is preferable, because thermal energies and stresses from each photoexcited regions could influence the processing accuracy. On the other hand, we found that the interaction of thermal energies and transient stresses in a parallel laser processing inside transparent materials can be used for controlling the spatial distributions of material properties. In this paper, we show two applications of the interactions between multiple photoexcited regions. One is the control of the shape of the heat modification and distributions of elements inside glasses. Another is the modification of dislocation bands inside rock-salt crystals by the interference of stress waves generated at multiple spots.

Citation Download Citation

Masaaki Sakakura, Takaya Tochio, Masahiro Shimizu, Naomi Yasuda, Masatoshi Ohnishi, Kiyotaka Miura, Yasuhiko Shimotsuma, and Kazuyuki Hirao "Control of material properties by parallel laser irradiations at multiple laser spots using a spatial light modulator", Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 824310 (15 February 2012); https://doi.org/10.1117/12.912752

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available