On-chip surface acoustic-wave driven microfluidic motors

Richie J. Shilton; Nick Glass; Sean Langelier; Peggy Chan; Leslie Y. Yeo; James R. Friend

doi:10.1117/12.903220

23 December 2011 On-chip surface acoustic-wave driven microfluidic motors

Richie J. Shilton, Nick Glass, Sean Langelier, Peggy Chan, Leslie Y. Yeo, James R. Friend

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82041J (2011) https://doi.org/10.1117/12.903220
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

We report on the design of two different surface acoustic wave (SAW) driven rotary motors. Both designs use 20-30 MHz transducers patterned onto Lithium Niobate (LN), geometrically tailored to generate Rayleigh waves that are incident on opposing sides of each rotor. The first design exploits the efficient coupling between SAWs and fluids by use of a fluid coupling layer between the rotor and substrate, leading to rotations of a 5 mm disc shaped rotor over 2,500 rpm with a start-up torque of 60 nN m. The second design exploits a dry friction contact between the surface and rotors for further miniaturisation. In the latter design 1 mm steel rotors are driven up to 6,000 rpm with no external preload required.

Citation Download Citation

Richie J. Shilton, Nick Glass, Sean Langelier, Peggy Chan, Leslie Y. Yeo, and James R. Friend "On-chip surface acoustic-wave driven microfluidic motors", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82041J (23 December 2011); https://doi.org/10.1117/12.903220

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available