Imprint process for optical device with periodic structure

Junji Nishii

doi:10.1117/12.904807

23 December 2011 Imprint process for optical device with periodic structure

Junji Nishii

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 820405 (2011) https://doi.org/10.1117/12.904807
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

Imprint process to form fine structures onto a glass surface was studied with the aim of developing several functions such as antireflection, dispersion correction and polarization control. The fabrication of SiC molds with high thermal durability and mechanical strength enabled us to imprint an antireflection structure with reflectivity of 1/20 that of the polished surface in the visible wavelength region. Furthermore, such technology was successfully applied to the fabrication of antireflection lens.

Citation Download Citation

Junji Nishii "Imprint process for optical device with periodic structure", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 820405 (23 December 2011); https://doi.org/10.1117/12.904807

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