New system of miniaturization online testing of spherical interferometer

Jian Lin; Zhenhua Han; Jinzhai Zhuo; Min Wang

doi:10.1117/12.906152

5 December 2011 New system of miniaturization online testing of spherical interferometer

Jian Lin, Zhenhua Han, Jinzhai Zhuo, Min Wang

Proceedings Volume 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 819718 (2011) https://doi.org/10.1117/12.906152
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

With the aim to measure the radius of curvature deviation and the surface form deviation of optical elements online in the workshop, based on laser testing technique, two solutions of miniaturization without precision guider sphericity interferometer systems are described, and the principle of systems are analyzed. Compared with the traditional sphericity interferometer, the systems designed are particularly suitable for testing mirror noncontact online in workshop, advantaged in compact structure, no precision guider, high efficiency and low costs. The interferometer systems use the different radius of curvature of existing spherical test plates in the production workshop to produce reference wavefront. The systems can not only get the astigmatism and local deviation of lens, but also can reflect the radius of curvature deviation, which provides rapid and nondestructive noncontact online testing.

Citation Download Citation

Jian Lin, Zhenhua Han, Jinzhai Zhuo, and Min Wang "New system of miniaturization online testing of spherical interferometer", Proc. SPIE 8197, 2011 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 819718 (5 December 2011); https://doi.org/10.1117/12.906152

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KEYWORDS

Interferometers

Mirrors

Spherical lenses

Monochromatic aberrations

Optical testing

Mouth

Image quality

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