Phase-image-correlation-based high sensitive optical nanoscope

Daesuk Kim; Byung Joon Baek; Andrei V. Zvyagin; Hyungchul Lee; Yong Jai Cho

doi:10.1117/12.899605

23 August 2011 Phase-image-correlation-based high sensitive optical nanoscope

Daesuk Kim, Byung Joon Baek, Andrei V. Zvyagin, Hyungchul Lee, Yong Jai Cho

Proceedings Volume 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics; 81730S (2011) https://doi.org/10.1117/12.899605
Event: International Conference on Fiber Optics and Photonics, 2010, Guwahati, India

Abstract

We describe a novel real time optical 3D nanoscope scheme that can be applied for both metrology and inspection in various semiconductor fields. Since the proposed off-axis scheme based on a matched filter correlation method basically measure the phase information of a nano object, the proposed scheme has some benefits in terms of sensitivity in both 3D geometry measurement and defect inspection capability. In this study, the feasibility of the proposed scheme has been evaluated by combining the conical diffraction and wave propagation simulation codes.

Citation Download Citation

Daesuk Kim, Byung Joon Baek, Andrei V. Zvyagin, Hyungchul Lee, and Yong Jai Cho "Phase-image-correlation-based high sensitive optical nanoscope", Proc. SPIE 8173, Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, 81730S (23 August 2011); https://doi.org/10.1117/12.899605

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