Enhancement of global CD correction and data processing in EB mask writer EBM-8000

Hiroshi Matsumoto; Yasuo Kato; Tomoo Motosugi; Jun Yashima; Takayuki Abe; Noriaki Nakayamada; Shusuke Yoshitake; Kiyoshi Hattori

doi:10.1117/12.898846

13 October 2011 Enhancement of global CD correction and data processing in EB mask writer EBM-8000

Hiroshi Matsumoto, Yasuo Kato, Tomoo Motosugi, Jun Yashima, Takayuki Abe, Noriaki Nakayamada, Shusuke Yoshitake, Kiyoshi Hattori

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Proceedings Volume 8166, Photomask Technology 2011; 816620 (2011) https://doi.org/10.1117/12.898846
Event: SPIE Photomask Technology, 2011, Monterey, California, United States

Abstract

We report our development of fogging effect correction method aimed for EBM-8000, our newest series of EB mask writers for mask production of 22nm half-pitch generation and for mask development of 16nm half-pitch generation. We refined the method of fogging effect correction by taking account of dose modulation for proximity effects correction and loading effect correction into fogging effect correction, greatly reducing theoretical error. Writing experiment has shown that our method based on the threshold dose model is effective, though deviation from the model is observed.

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Hiroshi Matsumoto, Yasuo Kato, Tomoo Motosugi, Jun Yashima, Takayuki Abe, Noriaki Nakayamada, Shusuke Yoshitake, and Kiyoshi Hattori "Enhancement of global CD correction and data processing in EB mask writer EBM-8000", Proc. SPIE 8166, Photomask Technology 2011, 816620 (13 October 2011); https://doi.org/10.1117/12.898846

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