Diffractive simultaneous lateral shearing interferometry

Vanusch Nercissian; Irina Harder; Klaus Mantel; Andreas Berger; Norbert Lindlein

doi:10.1117/12.895004

26 May 2011 Diffractive simultaneous lateral shearing interferometry

Vanusch Nercissian, Irina Harder, Klaus Mantel, Andreas Berger, Norbert Lindlein

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821D (2011) https://doi.org/10.1117/12.895004
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

A lateral shearing interferometer usually provides the slope data of a wave front under test along one direction. For the complete reconstruction of the wavefront, two slope datasets along different directions are required. Based on diffractive gratings, a simultaneous measurement of bothdata sets can be carried out. Two possible realizations are presented using a polarization signature and a partially coherent light source.

Citation Download Citation

Vanusch Nercissian, Irina Harder, Klaus Mantel, Andreas Berger, and Norbert Lindlein "Diffractive simultaneous lateral shearing interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821D (26 May 2011); https://doi.org/10.1117/12.895004

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