Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

V. Korpelainen; J. Seppä; A. Lassila

doi:10.1117/12.883818

1 June 2011 Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

V. Korpelainen, J. Seppä, A. Lassila

Author Affiliations +

Proceedings Volume 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 80360Q (2011) https://doi.org/10.1117/12.883818
Event: SPIE Defense, Security, and Sensing, 2011, Orlando, Florida, United States

Abstract

Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of AFMs. In order to have traceability to the SI-metre, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task specific measurement strategies for step height and pitch calibrations with MIKES metrological AFM are described. The strategies were developed to give high accuracy and to reduce the measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given.

Citation Download Citation

V. Korpelainen, J. Seppä, and A. Lassila "Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM", Proc. SPIE 8036, Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 80360Q (1 June 2011); https://doi.org/10.1117/12.883818

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