On The Reconstruction Of The Topography Of A Rough Metal Surface By Optical Ellipsometry On The Diffusely Scattered Light. Beyond The First-Order Born Approximation In Vector Scattering Theory

O. Keller; P. Sonderkaer

doi:10.1117/12.967121

1 January 1987 On The Reconstruction Of The Topography Of A Rough Metal Surface By Optical Ellipsometry On The Diffusely Scattered Light. Beyond The First-Order Born Approximation In Vector Scattering Theory

O. Keller, P. Sonderkaer

Author Affiliations +

Proceedings Volume 0802, In-Process Optical Metrology for Precision Machining; (1987) https://doi.org/10.1117/12.967121
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

On the basis of a recently established dyadic Green's function formalism describing the diffuse scattering of light from a rough surface, we investigate the fundamental integral equation describing, selfconsistently, the electromagnetic field in the selvedge, i.e. profile, region. With emphasis on the physical properties, a detailed description is given of the Green's function which by screened radiation couples the different external current density sources in the profile together. Numerical calculations showing the electromagnetic radiation in the plane of a flat surface stemming from an oscillating dipole just outside the surface are presented. Finally, a few remarks are presented concerning the determination of the selvedge field associated with a so-called strip geometry of the surface topography.

Citation Download Citation

O. Keller and P. Sonderkaer "On The Reconstruction Of The Topography Of A Rough Metal Surface By Optical Ellipsometry On The Diffusely Scattered Light. Beyond The First-Order Born Approximation In Vector Scattering Theory", Proc. SPIE 0802, In-Process Optical Metrology for Precision Machining, (1 January 1987); https://doi.org/10.1117/12.967121

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