Preparation of an optically activated field effect transistor based on diamond film

Lingyun Shi; Ke Tang; Jian Huang; Qinkai Zeng; Linjun Wang

doi:10.1117/12.888360

18 February 2011 Preparation of an optically activated field effect transistor based on diamond film

Lingyun Shi, Ke Tang, Jian Huang, Qinkai Zeng, Linjun Wang

Proceedings Volume 7995, Seventh International Conference on Thin Film Physics and Applications; 799526 (2011) https://doi.org/10.1117/12.888360
Event: Seventh International Conference on Thin Film Physics and Applications, 2010, Shanghai, China

Abstract

Freestanding diamond (FSD) film with p-type hydrogen-terminated nucleation surface was prepared by microwave plasma chemical vapour deposition (MPCVD) method. The post-treatment (wet chemical etch and annealing process) on the property of diamond film was investigated. The preparation and characterization of hydrogen-terminated diamond film p-type channel metal-semiconductor field effect transistors (MESFETs) was studied. The device was also used for photodetector application. The results showed the potential of high switching speed and high sensitivity to ultraviolet (UV).

Citation Download Citation

Lingyun Shi, Ke Tang, Jian Huang, Qinkai Zeng, and Linjun Wang "Preparation of an optically activated field effect transistor based on diamond film", Proc. SPIE 7995, Seventh International Conference on Thin Film Physics and Applications, 799526 (18 February 2011); https://doi.org/10.1117/12.888360

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available