Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching

Jen-Yi Wuu; Fedor G. Pikus; Malgorzata Marek-Sadowska

doi:10.1117/12.879546

4 April 2011 Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching

Jen-Yi Wuu, Fedor G. Pikus, Malgorzata Marek-Sadowska

Author Affiliations +

Proceedings Volume 7974, Design for Manufacturability through Design-Process Integration V; 79740U (2011) https://doi.org/10.1117/12.879546
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

Early lithographic hotspot detection has become increasingly important in achieving lithography-friendly designs and manufacturability closure. Fast physical verification tools employing pattern matching or machine learning techniques have emerged as great options for detecting hotspots in the early design stages. In this work, we propose a characterization methodology that provides measurable quantification of a given hotspot detection tool's capability to capture a previously seen or unseen hotspot pattern. Using this methodology, we conduct a side-by-side comparison of two hotspot detection methods-one using pattern matching and the other based on machine learning. The experimental results reveal that machine learning classifiers are capable of predicting unseen samples but may mispredict some of its training samples. On the other hand, pattern matching-based tools exhibit poorer predictive capability but guarantee full and fast detection on all their training samples. Based on these observations, we propose a hybrid detection solution that utilizes both pattern matching and machine learning techniques. Experimental results show that the hybrid solution combines the strengths of both algorithms and delivers improved detection accuracy while sacrificing little runtime efficiency.

Citation Download Citation

Jen-Yi Wuu, Fedor G. Pikus, and Malgorzata Marek-Sadowska "Efficient approach to early detection of lithographic hotspots using machine learning systems and pattern matching", Proc. SPIE 7974, Design for Manufacturability through Design-Process Integration V, 79740U (4 April 2011); https://doi.org/10.1117/12.879546

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