Scatterometry simulator using GPU and evolutionary algorithm

Hirokimi Shirasaki

doi:10.1117/12.881505

20 April 2011 Scatterometry simulator using GPU and evolutionary algorithm

Hirokimi Shirasaki

Author Affiliations +

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79711T (2011) https://doi.org/10.1117/12.881505
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

In this paper, we show scatterometry simulation software which has the spectroscopy calculation and optimization algorithm systems. The calculation is sped up by parallel computing using the GPU (Graphics Processor Unit). Here, we use the programming language CUDA (Compute Unified Device Architecture) and CULA (CULApack) for the NVIDIA GPU. We calculate the spectroscopy using the rigorous coupled wave analysis (RCWA) which provides a method for calculating the diffraction of electromagnetic waves by periodic grating. An evolutionary algorithm (EA) and a conjugate gradient (CG) method are used as the technique to automatically search the data which resembles the given spectrum. Then, the results using this simulator are provided.

Citation Download Citation

Hirokimi Shirasaki "Scatterometry simulator using GPU and evolutionary algorithm", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79711T (20 April 2011); https://doi.org/10.1117/12.881505

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE