Fast and accurate calibration for OPC process-window model using inverse weight algorithm

Ashesh Parikh

doi:10.1117/12.877489

20 April 2011 Fast and accurate calibration for OPC process-window model using inverse weight algorithm

Ashesh Parikh

Author Affiliations +

Proceedings Volume 7971, Metrology, Inspection, and Process Control for Microlithography XXV; 79710P (2011) https://doi.org/10.1117/12.877489
Event: SPIE Advanced Lithography, 2011, San Jose, California, United States

Abstract

A data-set comprising of lines and spaces was collected by inline scanning electron microscope at a single measurement threshold. Input data included measurements from features of several sizes at a range of pitch values as well as the entire Bossung curve for certain critical features. Models were calibrated with and without scaling of cost weight. Weights were scaled using inverse weight algorithm based on the differential sensitivity to focus for various feature types to a given lithography system. The imaging and the resist empirical parameters were extracted by regression over the entire data-set and a truncated version of the same data-set. The through-focus fitting error reduced by over 50% from +/- 5% to 2% with the cost weights scaled using the inverse weight algorithm. The quickness combined with the ability to extract fitting parameters precisely using this technique has enabled implementation on various digital and analog layers ranging from 180nm to 65nm nodes.

Citation Download Citation

Ashesh Parikh "Fast and accurate calibration for OPC process-window model using inverse weight algorithm", Proc. SPIE 7971, Metrology, Inspection, and Process Control for Microlithography XXV, 79710P (20 April 2011); https://doi.org/10.1117/12.877489

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE