Paper
7 February 2011 Fully micro-fabricated VECSEL at 850 nm
Author Affiliations +
Abstract
We report the demonstration of a fully micro-fabricated vertical-external-cavity surface-emitting laser (VECSEL) operating at wavelengths near 850 nm. The external-cavity length is on the order of 25 microns, and the external mirror is a dielectric distributed Bragg reflector with a radius of curvature of 130 microns that is micro-fabricated on top of the active semiconductor portion of the device. The additional cavity length, relative to a VCSEL, enables higher output power and narrower laser linewidth, and micro-fabrication of the external mirror preserves the manufacturing cost advantages of parallel lithographic alignment.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Darwin K. Serkland, Kent M. Geib, Gordon A. Keeler, and Gregory M. Peake "Fully micro-fabricated VECSEL at 850 nm", Proc. SPIE 7952, Vertical-Cavity Surface-Emitting Lasers XV, 79520L (7 February 2011); https://doi.org/10.1117/12.875700
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Photoresist materials

Dielectrics

Semiconductors

Microfabrication

Mirrors

Vertical cavity surface emitting lasers

Optical alignment

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