MEMS-based laser scanning microscope for endoscopic use

U. Schelinski; J. Knobbe; H.-G. Dallmann; H. Grüger; M. Förster; M. Scholles; M. Schwarzenberg; R. Rieske

doi:10.1117/12.874625

11 February 2011 MEMS-based laser scanning microscope for endoscopic use

U. Schelinski, J. Knobbe, H.-G. Dallmann, H. Grüger, M. Förster, M. Scholles, M. Schwarzenberg, R. Rieske

Proceedings Volume 7930, MOEMS and Miniaturized Systems X; 793004 (2011) https://doi.org/10.1117/12.874625
Event: SPIE MOEMS-MEMS, 2011, San Francisco, California, United States

Abstract

A miniaturized MEMS scanning microscope is presented, which enables endoscopic imaging for medical, biological and technical purposes. It consists of an optical head of only 8 mm diameter that is coupled via optical fibers and wires to a distant unit containing optics and electronics for microscope control and data processing. A PC or notebook is completing the system, acting as user interface, image display and storage. The microscope uses a focused flying laser spot allowing a resolution of about 15 μm within the focus plane. This enables new endoscopic applications as in-vivo investigation of cancer-suspicious tissues in medicine.

Citation Download Citation

U. Schelinski, J. Knobbe, H.-G. Dallmann, H. Grüger, M. Förster, M. Scholles, M. Schwarzenberg, and R. Rieske "MEMS-based laser scanning microscope for endoscopic use", Proc. SPIE 7930, MOEMS and Miniaturized Systems X, 793004 (11 February 2011); https://doi.org/10.1117/12.874625

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