Research on the surface reflectance measurement of optical element with transparent substrate

Guo Xia; Xingzhi Gong; Liang Cheng; Feihong Yu

doi:10.1117/12.871620

9 November 2010 Research on the surface reflectance measurement of optical element with transparent substrate

Guo Xia, Xingzhi Gong, Liang Cheng, Feihong Yu

Proceedings Volume 7849, Optical Design and Testing IV; 78492V (2010) https://doi.org/10.1117/12.871620
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Because of the substrate back reflectance phenomena, the reflectance of optical elements on a transparent substrate is totally different from that of on an opaque substrate. In this paper, the differences between normal and quasi-normal substrate back reflectance are analyzed for the first time. Then a detailed study of the influences of the substrate thickness, substrate material, measuring distance and other parameters in the measurement are performed, the computational expressions of fitting surface reflectance are derived, and a compensation model of the substrate back reflectance measurement is proposed. Simulation and experimental results prove the correctness of the theoretical model and show this compensation model can be used in the substrate back reflectance measurement.

Citation Download Citation

Guo Xia, Xingzhi Gong, Liang Cheng, and Feihong Yu "Research on the surface reflectance measurement of optical element with transparent substrate", Proc. SPIE 7849, Optical Design and Testing IV, 78492V (9 November 2010); https://doi.org/10.1117/12.871620

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