Mixed-signal 0.18um CMOS and SiGe BiCMOS foundry technologies for ROIC applications

Arjun Kar-Roy; David Howard; Marco Racanelli; Mike Scott; Paul Hurwitz; Robert Zwingman; Samir Chaudhry; Scott Jordan

doi:10.1117/12.865173

3 November 2010 Mixed-signal 0.18μm CMOS and SiGe BiCMOS foundry technologies for ROIC applications

Arjun Kar-Roy, David Howard, Marco Racanelli, Mike Scott, Paul Hurwitz, Robert Zwingman, Samir Chaudhry, Scott Jordan

Proceedings Volume 7834, Electro-Optical and Infrared Systems: Technology and Applications VII; 78340R (2010) https://doi.org/10.1117/12.865173
Event: SPIE Security + Defence, 2010, Toulouse, France

Abstract

Today's readout integrated-circuits (ROICs) require a high level of integration of high performance analog and low power digital logic. TowerJazz offers a commercial 0.18μm CMOS technology platform for mixed-signal, RF, and high performance analog applications which can be used for ROIC applications. The commercial CA18HD dual gate oxide 1.8V/3.3V and CA18HA dual gate oxide 1.8V/5V RF/mixed signal processes, consisting of six layers of metallization, have high density stacked linear MIM capacitors, high-value resistors, triple-well isolation and thick top aluminum metal. The CA18HA process also has scalable drain extended LDMOS devices, up to 40V V_ds, for high-voltage sensor applications, and high-performance bipolars for low noise requirements in ROICs. Also discussed are the available features of the commercial SBC18 SiGe BiCMOS platform with SiGe NPNs operating up to 200/200GHz (f_T/f_MAX frequencies in manufacturing and demonstrated to 270 GHz f_T, for reduced noise and integrated RF capabilities which could be used in ROICs. Implementation of these technologies in a thick film SOI process for integrated RF switch and power management and the availability of high f_T vertical PNPs to enable complementary BiCMOS (CBiCMOS), for RF enabled ROICs, are also described in this paper.

Citation Download Citation

Arjun Kar-Roy, David Howard, Marco Racanelli, Mike Scott, Paul Hurwitz, Robert Zwingman, Samir Chaudhry, and Scott Jordan "Mixed-signal 0.18μm CMOS and SiGe BiCMOS foundry technologies for ROIC applications", Proc. SPIE 7834, Electro-Optical and Infrared Systems: Technology and Applications VII, 78340R (3 November 2010); https://doi.org/10.1117/12.865173

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