2 &#956;m InGaSb/GaSb laterally coupled distributed feedback laser fabricated by nanoimprint lithography

K. Haring; J. Viheriälä; M.-R. Viljanen; J. Paajaste; R. Koskinen; S. Suomalainen; A. Laakso; K. Leinonen; T. Niemi; M. Guina

doi:10.1117/12.890260

22 March 2011 2 μm InGaSb/GaSb laterally coupled distributed feedback laser fabricated by nanoimprint lithography

K. Haring, J. Viheriälä, M.-R. Viljanen, J. Paajaste, R. Koskinen, S. Suomalainen, A. Laakso, K. Leinonen, T. Niemi, M. Guina

Author Affiliations +

Proceedings Volume 7822, Laser Optics 2010; 782208 (2011) https://doi.org/10.1117/12.890260
Event: Laser Optics 2010, 2010, St. Petersburg, Russian Federation

Abstract

We report the development of a nanoimprint lithography patterning method and inductively coupled plasma etching recipe designed for GaSb-based semiconductor materials. The developed processes were used to fabricate edge-emitting ridge-waveguide lasers and laterally-coupled distributed feedback lasers operating at 1945 nm. For ridge-waveguide laser with 1 mm cavity length, a threshold current of 32 mA was measured. Side-mode suppression ratio in excess of 30 dB was measured for the distributed feedback lasers with 2 mW output power and the output wavelength was temperature-tunable with a tuning coefficient of 0.16 nm /°C.

Citation Download Citation

K. Haring, J. Viheriälä, M.-R. Viljanen, J. Paajaste, R. Koskinen, S. Suomalainen, A. Laakso, K. Leinonen, T. Niemi, and M. Guina "2 μm InGaSb/GaSb laterally coupled distributed feedback laser fabricated by nanoimprint lithography", Proc. SPIE 7822, Laser Optics 2010, 782208 (22 March 2011); https://doi.org/10.1117/12.890260

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available