Ordered/disordered broadband antireflective structures for near-infrared detector applications

Young Min Song; Eun Sil Choi; Gyeong Cheol Park; Sung Jun Jang; Jae Su Yu; Yong Tak Lee

doi:10.1117/12.859985

27 August 2010 Ordered/disordered broadband antireflective structures for near-infrared detector applications

Young Min Song, Eun Sil Choi, Gyeong Cheol Park, Sung Jun Jang, Jae Su Yu, Yong Tak Lee

Proceedings Volume 7808, Infrared Remote Sensing and Instrumentation XVIII; 78080Y (2010) https://doi.org/10.1117/12.859985
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

This study reports broadband antireflective subwavelength structures (SWS) on various semiconductor materials for near-infrared detector applications. Two fabrication methods are proposed, i.e., a lenslike shape transfer and an overall dry etch process of Ag nanoparticles. These methods provide relatively simple, fast, inexpensive process steps, which is applicable for practical device applications. The fabricated SWS showed extremely lower reflectance spectra compared to that of flat surface in the near-IR range, indicating good agreement with the simulation results. We also propose amorphous silicon SWS on InGaAs photodetector to enhance the absorption efficiency.

Citation Download Citation

Young Min Song, Eun Sil Choi, Gyeong Cheol Park, Sung Jun Jang, Jae Su Yu, and Yong Tak Lee "Ordered/disordered broadband antireflective structures for near-infrared detector applications", Proc. SPIE 7808, Infrared Remote Sensing and Instrumentation XVIII, 78080Y (27 August 2010); https://doi.org/10.1117/12.859985

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Antireflective coatings

Gallium arsenide

Reflectivity

Amorphous silicon

Refractive index

Etching

Photodetectors

Show All Keywords

Keywords/Phrases

Search In:

Publication Years