An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura; T. Kimura; H. Yokoyama; H. Yumoto; S. Matsuyama; K. Tamasaku; Y. Koumura; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.862291

24 September 2010 An adaptive optical system for sub-10nm hard x-ray focusing

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, K. Yamauchi

Author Affiliations +

Proceedings Volume 7803, Adaptive X-Ray Optics; 780304 (2010) https://doi.org/10.1117/12.862291
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

In the hard X-ray region, to obtain the theoretical resolution or diffraction limited focusing size in an imaging optical system, both ultraprecise optics and highly accurate alignment are necessary. An adaptive optical system is used for the compensation of aberrations in various optical systems, such as optical microscopes and space telescopes. In situ wavefront control of hard X-rays is also effective for realizing ideal performance. The aim of this paper is to develop an adaptive optical system for sub-10nm hard X-ray focusing. The adaptive optical system performs the wavefront measurement using a phase retrieval algorithm and wavefront control using grazing incidence deformable mirrors. Several results of experiments using the developed system are reported.

Citation Download Citation

H. Mimura, T. Kimura, H. Yokoyama, H. Yumoto, S. Matsuyama, K. Tamasaku, Y. Koumura, M. Yabashi, T. Ishikawa, and K. Yamauchi "An adaptive optical system for sub-10nm hard x-ray focusing", Proc. SPIE 7803, Adaptive X-Ray Optics, 780304 (24 September 2010); https://doi.org/10.1117/12.862291

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available