Robust liquid metal collector mirror for EUV and soft x-ray plasma sources

Kenneth Fahy; Fergal O'Reilly; Enda Scally; Paul Sheridan

doi:10.1117/12.860747

27 August 2010 Robust liquid metal collector mirror for EUV and soft x-ray plasma sources

Kenneth Fahy, Fergal O'Reilly, Enda Scally, Paul Sheridan

Proceedings Volume 7802, Advances in X-Ray/EUV Optics and Components V; 78020K (2010) https://doi.org/10.1117/12.860747
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Recent work in UCD has centred on the development of a liquid metal coating process for EUV and soft X-ray collector optics. The work involves using a room temperature liquid metal coated on a solid metal substrate of the appropriate form. The advances made demonstrate that a stable thin coating film on the interior surface of a rotating optic substrate is possible, and this offers promise as a solution to the problem of producing an atomically flat reflector that remains unspoiled in front of a multi-kilowatt EUV plasma. We report on the results of preliminary EUV tests carried out on a simple focusing liquid metal mirror.

Citation Download Citation

Kenneth Fahy, Fergal O'Reilly, Enda Scally, and Paul Sheridan "Robust liquid metal collector mirror for EUV and soft x-ray plasma sources", Proc. SPIE 7802, Advances in X-Ray/EUV Optics and Components V, 78020K (27 August 2010); https://doi.org/10.1117/12.860747

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