An assistance system for the selection of sensors in multi-scale measurement systems

Avinash Burla; Tobias Haist; Wolfram Lyda; Wolfgang Osten

doi:10.1117/12.860368

2 August 2010 An assistance system for the selection of sensors in multi-scale measurement systems

Avinash Burla, Tobias Haist, Wolfram Lyda, Wolfgang Osten

Proceedings Volume 7791, Interferometry XV: Applications; 77910I (2010) https://doi.org/10.1117/12.860368
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Optical inspection using multi-sensor multi-scale systems requires the selection of proper sensors, their parameters (e.g. resolution, N.A, lighting conditions), and measurement strategies. We propose an assistance system that automatically selects the suitable sensors and their parameters for an inspection specification. The specimen and the defects are described based on their properties (e.g. geometry, material etc) to the assistance system. The system then uses different "sub-assistants", each designed for a specific measurement technique, to recommend the most suitable measurement setups. The system and initial results for fringe projection techniques are presented.

Citation Download Citation

Avinash Burla, Tobias Haist, Wolfram Lyda, and Wolfgang Osten "An assistance system for the selection of sensors in multi-scale measurement systems", Proc. SPIE 7791, Interferometry XV: Applications, 77910I (2 August 2010); https://doi.org/10.1117/12.860368

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