Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems

Florian Hirth; Ana Pérez Grassi; Daniel G. Dorigo; Alexander W. Koch

doi:10.1117/12.859687

2 August 2010 Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems

Florian Hirth, Ana Pérez Grassi, Daniel G. Dorigo, Alexander W. Koch

Author Affiliations +

Proceedings Volume 7790, Interferometry XV: Techniques and Analysis; 77900V (2010) https://doi.org/10.1117/12.859687
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

There are various methods for film thickness measurement. This paper aims at thin film measurement methods which work with wavelength-dependent sensor signals, no matter how the signal was captured. These measurement systems are called Thin Film Reflectometers (TFR). The resolution of thin film reflection measurement is limited by the spectral resolution of the detection system, the spectral wavelength range and the analyzing algorithm. Analytical theory of four different algorithms for thin film measurement is described and algorithms are compared via numerical simulations. Most of these algorithms can be found both in the literature and in different software-libraries (e.g. MATLAB, LabVIEW...) To compare different algorithms, the reflected light intensities of a thin film have been simulated for an exemplary thin glass film and a common off-the-shelf-spectrometer, a broadband visible light source and characteristic noise levels. The same data was fed for four selected algorithms in order to compare the results. To characterize algorithms in resolution, range and accuracy, the standard deviation of the output data has been computed for different spectral windows and resolutions. As a result we can provide a concise recommendation for appropriate use of the presented TFR algorithms.

Citation Download Citation

Florian Hirth, Ana Pérez Grassi, Daniel G. Dorigo, and Alexander W. Koch "Comparison of different film thickness evaluation algorithms applicable to spectrometric interrogation systems", Proc. SPIE 7790, Interferometry XV: Techniques and Analysis, 77900V (2 August 2010); https://doi.org/10.1117/12.859687

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available