Nb-doped TiO2 transparent conducting coating by pulsed DC magnetron co-sputtering

Ssu-Hsiang Peng; Chien-Cheng Kuo; Meng-Chi Li; Shu-Hui Tsai; Cheng-Chung Lee

doi:10.1117/12.860483

19 August 2010 Nb-doped TiO₂ transparent conducting coating by pulsed DC magnetron co-sputtering

Ssu-Hsiang Peng, Chien-Cheng Kuo, Meng-Chi Li, Shu-Hui Tsai, Cheng-Chung Lee

Proceedings Volume 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI; 77860R (2010) https://doi.org/10.1117/12.860483
Event: SPIE Optical Engineering + Applications, 2010, San Diego, California, United States

Abstract

Nb doped TiO₂ (TNO) is a promising transparent conducting oxide suitable for many applications such as in solar cells, OLEDs, LEDs, FPDs, touch panels, etc. TNO thin film was deposited on an unheated glass substrate by pulsed direct current (DC) magnetron co-sputtering. After annealing in a vacuum (<9×10^-6 Torr) at 370° for 10 minutes, the film crystallized into a polycrystalline anatase TiO₂ structure, the resistivity decreased to 4.5×10^-4 Ω-cm and the average transmittance increased to above 70% in the visible light region. The influence of annealing on the TNO amorphous-to-anatase phase transition, decrease in the resistivity and increase in the average transmittance will be discussed.

Citation Download Citation

Ssu-Hsiang Peng, Chien-Cheng Kuo, Meng-Chi Li, Shu-Hui Tsai, and Cheng-Chung Lee "Nb-doped TiO₂ transparent conducting coating by pulsed DC magnetron co-sputtering", Proc. SPIE 7786, Current Developments in Lens Design and Optical Engineering XI; and Advances in Thin Film Coatings VI, 77860R (19 August 2010); https://doi.org/10.1117/12.860483

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