Paper
17 September 2010 Large-area stretchable sensors with integrating organic CMOS ICs with Si-CMOS LSIs
Tsuyoshi Sekitani, Koichi Ishida, Ute Zschieschang, Hagen Klauk, Makoto Takamiya, Takayasu Sakurai, Takao Someya
Author Affiliations +
Abstract
We have successfully manufactured rubber-like large-area stretchable integrated circuits comprising printed elastic conductors, organic transistor-based circuits, and silicon transistor-based circuits. Employing the first direct integration of organic and silicon (Si) integrated circuits, we have realized to develop a stretchable electromagnetic interference (EMI) measurement sheet that can detect EMI distribution on the surface of electronic devices by wrapping the devices in the sheet. The stretchable devices can spread over arbitrary surfaces including free-formed curvatures and movable parts, thereby significantly increasing the applications of electrical circuits.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tsuyoshi Sekitani, Koichi Ishida, Ute Zschieschang, Hagen Klauk, Makoto Takamiya, Takayasu Sakurai, and Takao Someya "Large-area stretchable sensors with integrating organic CMOS ICs with Si-CMOS LSIs", Proc. SPIE 7779, Organic Semiconductors in Sensors and Bioelectronics III, 777908 (17 September 2010); https://doi.org/10.1117/12.861019
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KEYWORDS
Electromagnetic coupling

Silicon

Transistors

Dielectrics

Electronic components

Integrated circuits

Sensors

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