Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution

Bruno Luong; Christian Néel; Ambroise Périn; Didier Rozière

doi:10.1117/12.856406

12 August 2010 Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution

Bruno Luong, Christian Néel, Ambroise Périn, Didier Rozière

Proceedings Volume 7733, Ground-based and Airborne Telescopes III; 77332D (2010) https://doi.org/10.1117/12.856406
Event: SPIE Astronomical Telescopes + Instrumentation, 2010, San Diego, California, United States

Abstract

This paper presents a recent progress in designing a nanometer-accurate inductive-type of edge sensor. A new technology of Direct Deposit on Glass (DDG) has been developed. The DDG technology also has high rate of reproducibility and is suitable for the mass production and still be a very cost-effective solution. The sensor designs are fully optimized using mechanical and EM modeling for specific metrology needs. We discuss briefly on various electronic architectures and their impacts on the maintainability of the system. We conclude the paper by showing the experimental results.

Citation Download Citation

Bruno Luong, Christian Néel, Ambroise Périn, and Didier Rozière "Inductive sensors for controlling segmented mirrors: a full industrial and turnkey product solution", Proc. SPIE 7733, Ground-based and Airborne Telescopes III, 77332D (12 August 2010); https://doi.org/10.1117/12.856406

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