Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer

Gary A. Burns; James A. Schoeffel

doi:10.1117/12.967059

1 January 1987 Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer

Gary A. Burns, James A. Schoeffel

Proceedings Volume 0772, Optical Microlithography VI; (1987) https://doi.org/10.1117/12.967059
Event: Microlithography Conferences, 1987, Santa Clara, CA, United States

Abstract

ATEQ Corporation has developed a high precision, high performance optical lithography system, the CORE-2000, based on scanning laser technology and optimized for the high speed writing of 5X and 10X reticles. A detailed evaluation of this system has been made using Nikon 21 measurement systems, KLA inspection systems, and throughput benchmark test patterns. This paper briefly describes the CORE-2000 and presents the results of this evaluation including registration performance, critical dimension control, defect control and throughput.

Citation Download Citation

Gary A. Burns and James A. Schoeffel "Performance Evaluation Of The Ateq Core-2000 Scanning Laser Reticle Writer", Proc. SPIE 0772, Optical Microlithography VI, (1 January 1987); https://doi.org/10.1117/12.967059

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