Comparability and uncertainty of shape measurements with white-light interferometers

S. Boedecker; W. Bauer; R. Krüger-Sehm; P. H. Lehmann; C. Rembe

doi:10.1117/12.853901

14 May 2010 Comparability and uncertainty of shape measurements with white-light interferometers

S. Boedecker, W. Bauer, R. Krüger-Sehm, P. H. Lehmann, C. Rembe

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180J (2010) https://doi.org/10.1117/12.853901
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We discuss how the results obtained from a white-light interferometer can be compared to tactile measurements. The core idea to achieve comparability is to determine a short cut-off wavelength up to which the spatial frequency components of the surface topography are measured with less than 3 dB attenuation. We demonstrate for different interferometers that the data has to be filtered to achieve a linear transfer characteristic which allows to define the short cut-off wavelength. In addition, we demonstrate investigations of the error sources in shape measurements that we have identified. Results of our work are influencing a VDI/VDE calibration guideline for shape measurements which is currently under development. We show in this paper how the procedure developed for the guideline can be employed to real measurement devices. Uncertainty contributions to the error budget are also discussed and measurements on shape standards are presented.

Citation Download Citation

S. Boedecker, W. Bauer, R. Krüger-Sehm, P. H. Lehmann, and C. Rembe "Comparability and uncertainty of shape measurements with white-light interferometers", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180J (14 May 2010); https://doi.org/10.1117/12.853901

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