CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components

Myriam Zerrad; Michel Lequime; Carole Deumié; Claude Amra

doi:10.1117/12.854059

14 May 2010 CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components

Myriam Zerrad, Michel Lequime, Carole Deumié, Claude Amra

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 77180A (2010) https://doi.org/10.1117/12.854059
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

A comprehensive characterisation tool for optical component is presented here. Based on both light scattering and imaging principles, the CCD-ARS set up allows to separate and study localized defects contribution from the local roughness measurement. The numerical method involved to discriminate intrinsic roughness from the influence of defects is detailed and some results are given.

Citation Download Citation

Myriam Zerrad, Michel Lequime, Carole Deumié, and Claude Amra "CCD-ARS set-up: a comprehensive and fast high-sensitivity characterisation tool for optical components", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 77180A (14 May 2010); https://doi.org/10.1117/12.854059

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