Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy

Jonas Kühn; Eduardo Solanas; Sébastien Bourquin; Jean-François Blaser; Luca Dorigatti; Thierry Keist; Yves Emery; Christian Depeursinge

doi:10.1117/12.854550

14 May 2010 Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy

Jonas Kühn, Eduardo Solanas, Sébastien Bourquin, Jean-François Blaser, Luca Dorigatti, Thierry Keist, Yves Emery, Christian Depeursinge

Author Affiliations +

Proceedings Volume 7718, Optical Micro- and Nanometrology III; 771805 (2010) https://doi.org/10.1117/12.854550
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present fast high-roughness and non-contact surface measurements by digital holographic microscopy (DHM). By using single- and dual-wavelength operation modes, coupled with advanced image stitching and non-measured points management methods, the technique enables two-dimensional roughness measurements up to the micrometer (N6). The sample is mechanically scanned over a surface up to 5 × 0.3 mm² with 17 holograms each acquired in less than 500 μs, the corresponding phase images stitched together by software, and therefore providing multiple profiles measurement in the ISO definition in less than 30 s. The approach is validated by inspection of several different roughness standards and our technique is demonstrated to be in agreement with two existing well-known techniques in the field.

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Jonas Kühn, Eduardo Solanas, Sébastien Bourquin, Jean-François Blaser, Luca Dorigatti, Thierry Keist, Yves Emery, and Christian Depeursinge "Fast noncontact surface roughness measurements up to the micrometer range by dual-wavelength digital holographic microscopy", Proc. SPIE 7718, Optical Micro- and Nanometrology III, 771805 (14 May 2010); https://doi.org/10.1117/12.854550

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