Fabrication of nano- and microstructures by electroforming

Praveen K. Dasari; Mehedi Paurazady; Ahalapitiya H. Jayatissa

doi:10.1117/12.850600

5 May 2010 Fabrication of nano- and microstructures by electroforming

Praveen K. Dasari, Mehedi Paurazady, Ahalapitiya H. Jayatissa

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 76791Z (2010) https://doi.org/10.1117/12.850600
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

Nano and micro-structure electrode gaps were fabricated by an electroforming method. Thin film materials were fabricated on an insulator substrate and the microelectrodes with desired shapes were fabricated. Then the electroformation was carried out to produce the gap structure. Controllability of the size of these gaps was investigated by modeling and experimental method. It was found that the nanostructure of wide range of metal, metal oxides and compound semiconductors can be fabricated by this method. In this study, we have attempted formation of Al and Au. Simulation study was carried out based on finite element analysis (FEA) technique. The simulation results were verified with the experimental data.

Citation Download Citation

Praveen K. Dasari, Mehedi Paurazady, and Ahalapitiya H. Jayatissa "Fabrication of nano- and microstructures by electroforming", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 76791Z (5 May 2010); https://doi.org/10.1117/12.850600

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