Paper
8 April 2010 Silicon-based thin film solid oxide fuel cell array
Pei-Chen Su, Fritz B. Prinz
Author Affiliations +
Abstract
Solid oxide fuel cells (SOFC) have been known for their clean and efficient energy conversion. SOFCs utilize a range of ceramic electrolyte materials, with yttria stabilized zirconia (YSZ) as the most common choice. Traditional SOFCs operate at relatively high temperatures (800-1000°C) due to their low oxide ion conductivity and high activation energy. Reducing the operating temperature is important to expand the field of SOFC applications, such as power sources for portable electronics. Reducing the electrolyte thickness by means of thin film deposition techniques to the submicrometer range is one way to reduce the Ohmic loss in SOFCs at lower temperature. In this paper, a miniature thin film fuel cell array is designed and fabricated targeting at reduced operating temperature as a potential portable power source.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pei-Chen Su and Fritz B. Prinz "Silicon-based thin film solid oxide fuel cell array", Proc. SPIE 7649, Nondestructive Characterization for Composite Materials, Aerospace Engineering, Civil Infrastructure, and Homeland Security 2010, 764907 (8 April 2010); https://doi.org/10.1117/12.863069
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KEYWORDS
Silicon

Thin films

Electrodes

Etching

Atomic layer deposition

Platinum

Semiconducting wafers

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