Investigation of periodical microstructures using coherent radiation

Giedrius Janusas; Arvydas Palevicius; Regita Bendikiene; Paulius Palevicius

doi:10.1117/12.855943

1 April 2010 Investigation of periodical microstructures using coherent radiation

Giedrius Janusas, Arvydas Palevicius, Regita Bendikiene, Paulius Palevicius

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76383Q (2010) https://doi.org/10.1117/12.855943
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Low-cost effective characterization methodology was developed that allows indirect evaluation of mechanical, geometrical and optical parameters of periodical microstructures in the cases when traditional measurement techniques are not suitable. Proposed methods are applicable for optimization and control of technological processes. Laser diffractometer is used in the experimental works for measurement of optical parameters of periodical microstructure and estimation of geometrical parameters with an error of less than 5% by comparing theoretical and experimental values of diffraction efficiencies of periodical microstructures. This method is suitable for geometry control of periodical microstructures during all technological process. Also an efficient method was developed that is capable to estimate with an error of 5% the depth of periodical microstructures, which have characteristic depths that are larger than the wavelength of coherent light used in the experiment. Quality of periodical microstructures is sensitive to thermal conditions during replication process. Therefore an experimental setup based on Michelson interferometer was developed for the investigation of induced thermal deformation. The radius and stress kinetics could be analyzed for different thickness of coated polymer. These are the problems that are considered in this paper.

Citation Download Citation

Giedrius Janusas, Arvydas Palevicius, Regita Bendikiene, and Paulius Palevicius "Investigation of periodical microstructures using coherent radiation", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76383Q (1 April 2010); https://doi.org/10.1117/12.855943

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