Position sensing using an integrated VCSEL and PIN photodetector microsystem

A. V. Giannopolous; A. M. Kasten; N. Hardy; T. Jefvert; K. D. Choquette

doi:10.1117/12.847343

5 February 2010 Position sensing using an integrated VCSEL and PIN photodetector microsystem

A. V. Giannopolous, A. M. Kasten, N. Hardy, T. Jefvert, K. D. Choquette

Proceedings Volume 7615, Vertical-Cavity Surface-Emitting Lasers XIV; 76150C (2010) https://doi.org/10.1117/12.847343
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

Compact, non-contact, and low operating power sensors are desirable for position sensing applications. Vertical-cavity surface-emitting lasers integrated monolithically with PIN photodetectors have been designed and fabricated for optical position sensing. This compound semiconductor component has in turn been integrated onto a Si-platform to form a microsystem. Using a metallic grating as a position gauge, the sensor microsystem can measure differences in reflected power from the grating as it travels parallel to the sensors. This measurement technique allows for a high spatial resolution. Calculations indicate that such a device can detect spatial changes on the order of the wavelength of light emitted from the laser. Measurements from the work described here show the potential to use VCSEL/PIN chips to determine position with an accuracy of sub-micron resolution.

Citation Download Citation

A. V. Giannopolous, A. M. Kasten, N. Hardy, T. Jefvert, and K. D. Choquette "Position sensing using an integrated VCSEL and PIN photodetector microsystem", Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150C (5 February 2010); https://doi.org/10.1117/12.847343

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