A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics

J. B. Wright; I. Brener; K. R. Westlake; D. W. Branch; M. J. Shaw; G. A. Vawter

doi:10.1117/12.842283

15 February 2010 A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics

J. B. Wright, I. Brener, K. R. Westlake, D. W. Branch, M. J. Shaw, G. A. Vawter

Author Affiliations +

Proceedings Volume 7605, Optoelectronic Integrated Circuits XII; 76050C (2010) https://doi.org/10.1117/12.842283
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

We demonstrate chemical/biological sensor arrays based on high quality factor evanescent microring waveguide resonators in a process that is compatible with CMOS fabrication, glass microfluidic integration, and robust surface chemistry ligand attachment. We cancel out any fluctuations due to liquid temperature variations through a differential dual sensor design. Using laser locking servo techniques we attain detection sensitivities in the ng/ml range. This combination of silicon photonic sensors, robust packaging, high sensitivity and arrayed design is capable of providing a platform for multiplexed chem-bio sensing of molecules suspended in solution.

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J. B. Wright, I. Brener, K. R. Westlake, D. W. Branch, M. J. Shaw, and G. A. Vawter "A platform for multiplexed sensing of biomolecules using high-Q microring resonator arrays with differential readout and integrated microfluidics", Proc. SPIE 7605, Optoelectronic Integrated Circuits XII, 76050C (15 February 2010); https://doi.org/10.1117/12.842283

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