High speed optical filtering using active resonant subwavelength gratings

A. V. Gin; S. A. Kemme; R. R. Boye; D. W. Peters; J. F. Ihlefeld; R. D. Briggs; J. R. Wendt; A. R. Ellis; L. H. Marshall; T. R. Carter; J. D. Hunker; S. Samora

doi:10.1117/12.842681

11 February 2010 High speed optical filtering using active resonant subwavelength gratings

A. V. Gin, S. A. Kemme, R. R. Boye, D. W. Peters, J. F. Ihlefeld, R. D. Briggs, J. R. Wendt, A. R. Ellis, L. H. Marshall, T. R. Carter, J. D. Hunker, S. Samora

Author Affiliations +

Proceedings Volume 7604, Integrated Optics: Devices, Materials, and Technologies XIV; 76040N (2010) https://doi.org/10.1117/12.842681
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In this work, we describe the most recent progress towards the device modeling, fabrication, testing and system integration of active resonant subwavelength grating (RSG) devices. Passive RSG devices have been a subject of interest in subwavelength-structured surfaces (SWS) in recent years due to their narrow spectral response and high quality filtering performance. Modulating the bias voltage of interdigitated metal electrodes over an electrooptic thin film material enables the RSG components to act as actively tunable high-speed optical filters. The filter characteristics of the device can be engineered using the geometry of the device grating and underlying materials. Using electron beam lithography and specialized etch techniques, we have fabricated interdigitated metal electrodes on an insulating layer and BaTiO₃ thin film on sapphire substrate. With bias voltages of up to 100V, spectral red shifts of several nanometers are measured, as well as significant changes in the reflected and transmitted signal intensities around the 1.55um wavelength. Due to their small size and lack of moving parts, these devices are attractive for high speed spectral sensing applications. We will discuss the most recent device testing results as well as comment on the system integration aspects of this project.

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A. V. Gin, S. A. Kemme, R. R. Boye, D. W. Peters, J. F. Ihlefeld, R. D. Briggs, J. R. Wendt, A. R. Ellis, L. H. Marshall, T. R. Carter, J. D. Hunker, and S. Samora "High speed optical filtering using active resonant subwavelength gratings", Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 76040N (11 February 2010); https://doi.org/10.1117/12.842681

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KEYWORDS

Ferroelectric materials

Electro optical modeling

Electrodes

Metals

Refractive index

Optical filters

Reflectivity

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