Rotating out-of-plane micromirror

Sahil Oak; Greg Edmiston; Ganapathy Sivakumar; Gabriel Ramirez; Tim Dallas

doi:10.1117/12.842003

16 February 2010 Rotating out-of-plane micromirror

Sahil Oak, Greg Edmiston, Ganapathy Sivakumar, Gabriel Ramirez, Tim Dallas

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 75940H (2010) https://doi.org/10.1117/12.842003
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

This paper presents a novel, micro-actuated system for beam steering or optical multiplexing applications. The system consists of polysilicon micromirror which is held at ~45° angle on a gear which has a rotational freedom of 360°. In this work, we use serpentine springs attached to a mirror with position specific "catch blocks" to hold the mirror at a desired angle on top of a rotating gear. Out-of-plane assembly is achieved using a simple, postprocessing procedure. The mirror platform is driven by an electrostatically actuated rotary drive. The mirror was tested for robustness and optical performance. Good correlation was found between experiment and various simulations.

Citation Download Citation

Sahil Oak, Greg Edmiston, Ganapathy Sivakumar, Gabriel Ramirez, and Tim Dallas "Rotating out-of-plane micromirror", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940H (16 February 2010); https://doi.org/10.1117/12.842003

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